VSimPD For Plasma Discharge Simulations

Plasma discharge simulation, plasma etching demo on laptop.

VSimPD is a versatile and powerful Particle-In-Cell (PIC) software application specifically optimized for plasma discharge simulation. VSimPD explicitly tracks kinetic particle species in arbitrary-pressure background gasses, including the effects of elastic, excitation, and ionization collisions between electrons, ions, and neutral particles.

Using Tech-X’s proprietary cut-cell algorithms, combined with VSim’s unique approach of using both FDTD and PIC methods, VSimPD quickly and accurately models complex particle dynamics in multiple dimensionalities. Powerful post-processing capabilities allow for robust analysis, and since VSim was designed to run in parallel, it easily installs on high performance computing systems. Originally created by Tech-X scientists, who continue to be leading contributors to the fields of plasma and computational physics, VSimPD is the most comprehensive solution for plasma discharge simulation.

Cylindrical sputtering magnetron Illustration of plasma discharge simulation

Learn how LG used VSimPD to optimize their magnetron sputtering process.

"VSim 是我們模擬磁控濺射的重要工具。 得益於通過 VSim 提供的大量功能,我們能夠準確預測現有設計的侵蝕剖面,VSim讓我們能夠繼續在未來優化設計。 Tech-X 的支援人員在我們最初的設置和建模過程中也非常有幫助。"
Geejo Lee
LG顯示科技股份有限公司CI製程團隊經理

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Every Evaluation Includes A Consultation With One Of Our Expert Physicists. 

VSimPD: Plasma Discharge Simulation Advantages

磁控濺射GeneralRev
VSimPD Plasma discharge modeling of corona discharge evolved potential with the geometries and particles superimposed.
VSimPD corona discharge evolved potential with the geometries and particles superimposed.

VSimPD 功能

  • 碰撞游離
  • 場游離
  • 電子游離
  • 電子散射體
  • 電荷交換
  • 濺射
  • 二元(非)彈性
  • 二元反應
  • 三體重組
  • 激發
  • 衰變
  • 吸收
  • 反射的
  • 週期性的
  • 用於表面電荷的累計
  • 部分透明
  • 帶電和中性粒子
  • Variable Weight, Constant Weight & Managed Weight
  • Relativistic
  • 指定的發射
  • 表面電荷
  • 二次發射
  • 導電和介電質邊界
  • 電荷和電流沉積
  • 歐拉(Euler)流體
  • 靜態背景氣體
  • Dey-Mittra切割格網
  • 隨空間變化的網格
  • 多維度

Ready To Evaluate VSimPD?

VSimPD 應用

電漿清洗

電漿增強化學氣相沉積

直流和射頻濺射

離子源

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