科罗拉多州博尔德-2020年4月9日。
新的晶圆蚀刻实例展示了您如何使用 VSim 对微电子学中使用的等离子体蚀刻室进行建模。这个例子展示了只有通过动态处理所有物种才能实现的基本物理学,并允许您定制您的腔室,以在整个晶圆上创建一个均匀的鞘,甚至在晶圆边缘。
科罗拉多州博尔德-2020年4月9日。
新的晶圆蚀刻实例展示了您如何使用 VSim 对微电子学中使用的等离子体蚀刻室进行建模。这个例子展示了只有通过动态处理所有物种才能实现的基本物理学,并允许您定制您的腔室,以在整个晶圆上创建一个均匀的鞘,甚至在晶圆边缘。
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